Stäubli Cleanroom robots meet ISO 14644-1 class 2 (SCR version) and class 4 (CR version) standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. Compared to other wafer robots, the Stäubli SCR and CR robots offer greater flexibility, higher payload capacity, and extended reach, perfectly meeting the challenges of wafer/photomask/carrier/cassette handling. A compact arm footprint also helps to save precious space in dedicated machines.

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Easy to clean

Smooth finishing

No retention area

Hexagonal flat cap screw with sealing*

For the best cleanliness level

Specific painting and assembly procedures

Minimal particle emission (ISO class 2/4 conformity)

Special cleanroom lip seals

*Not available on TX2-60/90 CR.

Main cleanroom applications

Semiconductor

To meet the robotics needs in semiconductor industry, Stäubli offers an ultra-high-performance line of Cleanroom robotic arms for highly sensitive applications.

Pharmaceutical and healthcare

Our robots blend hygiene and accuracy to meet the strict requirements of the healthcare and life sciences industries.